Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures

Published 2008 View Full Article

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Title
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 1, Pages 013530
Publisher
AIP Publishing
Online
2008-07-15
DOI
10.1063/1.2952044

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