Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures

标题
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 1, Pages 013530
出版商
AIP Publishing
发表日期
2008-07-15
DOI
10.1063/1.2952044

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