Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures

Published 2008 View Full Article

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Title
Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 9, Pages 094314
Publisher
AIP Publishing
Online
2008-11-13
DOI
10.1063/1.3013439

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