Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures

标题
Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 9, Pages 094314
出版商
AIP Publishing
发表日期
2008-11-13
DOI
10.1063/1.3013439

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