Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering

Published 2009 View Full Article

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Title
Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 486, Issue 1-2, Pages 515-520
Publisher
Elsevier BV
Online
2009-07-08
DOI
10.1016/j.jallcom.2009.06.194

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