Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering

标题
Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 486, Issue 1-2, Pages 515-520
出版商
Elsevier BV
发表日期
2009-07-08
DOI
10.1016/j.jallcom.2009.06.194

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