Superlattice Phase Change Memory Fabrication Process for Back End of Line Devices

Published 2013 View Full Article

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Title
Superlattice Phase Change Memory Fabrication Process for Back End of Line Devices
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 5S3, Pages 05FF01
Publisher
IOP Publishing
Online
2013-05-20
DOI
10.7567/jjap.52.05ff01

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