Process Performances of 2 ns Pulsed Discharge Plasma

Title
Process Performances of 2 ns Pulsed Discharge Plasma
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 8, Pages 08JF14
Publisher
Japan Society of Applied Physics
Online
2011-08-22
DOI
10.1143/jjap.50.08jf14

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