Process Performances of 2 ns Pulsed Discharge Plasma

标题
Process Performances of 2 ns Pulsed Discharge Plasma
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 8, Pages 08JF14
出版商
Japan Society of Applied Physics
发表日期
2011-08-22
DOI
10.1143/jjap.50.08jf14

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