Rare Earth Oxide Capping Effect on La$_{2}$O$_{3}$ Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5 nm

标题
Rare Earth Oxide Capping Effect on La$_{2}$O$_{3}$ Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5 nm
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 10, Pages 10PA04
出版商
Japan Society of Applied Physics
发表日期
2011-10-24
DOI
10.1143/jjap.50.10pa04

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started