A Three-Dimensional Nanostructure Consisting of Hollow TiO2Spheres Fabricated by Atomic Layer Deposition

Title
A Three-Dimensional Nanostructure Consisting of Hollow TiO2Spheres Fabricated by Atomic Layer Deposition
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 6, Pages 06GH06
Publisher
Japan Society of Applied Physics
Online
2011-06-20
DOI
10.1143/jjap.50.06gh06

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