Evaluation of Damage Layer in an Organic Film with Irradiation of Energetic Ion Beams

Published 2010 View Full Article

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Title
Evaluation of Damage Layer in an Organic Film with Irradiation of Energetic Ion Beams
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 49, Issue 3, Pages 036503
Publisher
Japan Society of Applied Physics
Online
2010-03-24
DOI
10.1143/jjap.49.036503

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