Evaluation of Damage Layer in an Organic Film with Irradiation of Energetic Ion Beams

标题
Evaluation of Damage Layer in an Organic Film with Irradiation of Energetic Ion Beams
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 49, Issue 3, Pages 036503
出版商
Japan Society of Applied Physics
发表日期
2010-03-24
DOI
10.1143/jjap.49.036503

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