Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3Thin Films

Published 2008 View Full Article

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Title
Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3Thin Films
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 9, Pages 7533-7536
Publisher
Japan Society of Applied Physics
Online
2008-09-19
DOI
10.1143/jjap.47.7533

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