Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3Thin Films

标题
Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3Thin Films
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 9, Pages 7533-7536
出版商
Japan Society of Applied Physics
发表日期
2008-09-19
DOI
10.1143/jjap.47.7533

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