Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric

Published 2008 View Full Article

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Title
Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 4, Pages 2515-2520
Publisher
Japan Society of Applied Physics
Online
2008-04-25
DOI
10.1143/jjap.47.2515

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