Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric

标题
Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 4, Pages 2515-2520
出版商
Japan Society of Applied Physics
发表日期
2008-04-25
DOI
10.1143/jjap.47.2515

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