Effects of Plasma Process Induced Damages on Organic Gate Dielectrics of Organic Thin-Film Transistors

Published 2008 View Full Article

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Title
Effects of Plasma Process Induced Damages on Organic Gate Dielectrics of Organic Thin-Film Transistors
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 7, Pages 5672-5675
Publisher
Japan Society of Applied Physics
Online
2008-07-18
DOI
10.1143/jjap.47.5672

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