Effects of Plasma Process Induced Damages on Organic Gate Dielectrics of Organic Thin-Film Transistors

标题
Effects of Plasma Process Induced Damages on Organic Gate Dielectrics of Organic Thin-Film Transistors
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 7, Pages 5672-5675
出版商
Japan Society of Applied Physics
发表日期
2008-07-18
DOI
10.1143/jjap.47.5672

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