A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence

标题
A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
作者
关键词
-
出版物
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
Volume 51, Issue 8, Pages 2324-2338
出版商
Informa UK Limited
发表日期
2013-03-01
DOI
10.1080/00207543.2012.737943

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