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Title
Research development of silicon MEMS gyroscopes: a review
Authors
Keywords
Inertial Measurement Unit, Rotary Inertia, Tuning Fork, Proof Mass, Gyroscope System
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 21, Issue 10, Pages 2053-2066
Publisher
Springer Nature
Online
2015-08-05
DOI
10.1007/s00542-015-2645-x
References
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- A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
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