Capacitive flexible pressure sensor: microfabrication process and experimental characterization
Published 2015 View Full Article
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Title
Capacitive flexible pressure sensor: microfabrication process and experimental characterization
Authors
Keywords
PDMS, Sensor Array, PDMS Layer, PDMS Film, Capacitive Pressure Sensor
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 22, Issue 3, Pages 465-471
Publisher
Springer Nature
Online
2015-04-25
DOI
10.1007/s00542-015-2540-5
References
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