Focused high- and low-energy ion milling for TEM specimen preparation

Published 2015 View Full Article

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Title
Focused high- and low-energy ion milling for TEM specimen preparation
Authors
Keywords
TEM specimen preparation, Focused low-energy ion milling, Thin films, Interfaces, GaN, Phase change materials
Journal
MICROELECTRONICS RELIABILITY
Volume 55, Issue 9-10, Pages 2119-2125
Publisher
Elsevier BV
Online
2015-07-08
DOI
10.1016/j.microrel.2015.07.005

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