Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy

Published 2011 View Full Article

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Title
Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
Authors
Keywords
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Journal
IET Nanobiotechnology
Volume 5, Issue 4, Pages 108-113
Publisher
Institution of Engineering and Technology (IET)
Online
2011-12-03
DOI
10.1049/iet-nbt.2011.0007

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