Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy

标题
Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
作者
关键词
-
出版物
IET Nanobiotechnology
Volume 5, Issue 4, Pages 108-113
出版商
Institution of Engineering and Technology (IET)
发表日期
2011-12-03
DOI
10.1049/iet-nbt.2011.0007

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