Optical characterization of hafnium oxide thin films for heat mirrors

标题
Optical characterization of hafnium oxide thin films for heat mirrors
作者
关键词
Optical properties, Annealing, X-ray diffraction, Atomic force microscopy, Insulator-metal-insulator (IMI) structure
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 32, Issue -, Pages 22-30
出版商
Elsevier BV
发表日期
2015-01-22
DOI
10.1016/j.mssp.2014.12.079

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