Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films

Published 2015 View Full Article

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Title
Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films
Authors
Keywords
Carbon ions irradiation, ZrN, Cathodic arc ion, XRD, Electrical resistivity
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 39, Issue -, Pages 530-535
Publisher
Elsevier BV
Online
2015-06-16
DOI
10.1016/j.mssp.2015.05.062

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