Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films

标题
Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films
作者
关键词
Carbon ions irradiation, ZrN, Cathodic arc ion, XRD, Electrical resistivity
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 39, Issue -, Pages 530-535
出版商
Elsevier BV
发表日期
2015-06-16
DOI
10.1016/j.mssp.2015.05.062

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