Journal
IEEE TRANSACTIONS ON POWER ELECTRONICS
Volume 28, Issue 9, Pages 4384-4394Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPEL.2012.2233760
Keywords
High-frequency dc-dc converter; inductors; microfabricated inductor; thin films; V-groove; very-high-frequency (VHF) power conversion
Categories
Funding
- Draper Laboratories
- Interconnect Focus Center
- Focus Center Research Program, a Semiconductor Research Corporation program
Ask authors/readers for more resources
V-groove microinductors are designed, fabricated, and tested for operation above 10 MHz. Multilayer nanogranular Co-Zr-O/ZrO2 magnetic thin films are used as the core material of these inductors, to improve the magnetic performance of the films deposited on the sidewalls of V-grooves and to control eddy-current loss in the core. Prototype V-groove inductors are fabricated in a Si substrate based on optimization results for 7 to 3.3-V, 1-A dc-dc buck converters. The inductors exhibit an inductance of 3.4 nH from 10 to 100 MHz, a dc resistance of 3.83 m Omega, and a quality factor of up to at least 50. The prototype inductors are a promising candidate for high-power-density high-efficiency dc-dc converters. The measured inductor performance indicates that they could be used to make a 7 to 3.3-V, 1-A converter exhibiting a power density of 2.5 W/mm(2) and an efficiency of 86% at 100 MHz; or a power density of 0.36 W/mm(2) and an efficiency of 91% at 11 MHz.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available