Impact of Phase Shifted Coil Currents on Plasma Uniformity

Published 2011 View Full Article

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Title
Impact of Phase Shifted Coil Currents on Plasma Uniformity
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 39, Issue 11, Pages 2516-2517
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-10
DOI
10.1109/tps.2011.2140337
References
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