Impact of Phase Shifted Coil Currents on Plasma Uniformity

标题
Impact of Phase Shifted Coil Currents on Plasma Uniformity
作者
关键词
-
出版物
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 39, Issue 11, Pages 2516-2517
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-05-10
DOI
10.1109/tps.2011.2140337

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