Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes

Published 2009 View Full Article

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Title
Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 37, Issue 6, Pages 961-969
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-06-03
DOI
10.1109/tps.2009.2015226

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