Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes

标题
Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes
作者
关键词
-
出版物
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 37, Issue 6, Pages 961-969
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-06-03
DOI
10.1109/tps.2009.2015226

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