Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering
Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering
Authors
Keywords
Al and Ga co-doped ZnO, Thin films, Sputtering, Electrical properties, Substrate temperature
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