Journal
MATERIALS LETTERS
Volume 160, Issue -, Pages 222-226Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2015.07.141
Keywords
Piezoelectric materials; Energy storage and conversion; Nanogenerators; Silicon nanowires; alpha-Quartz
Funding
- National Basic Research Program of China (973 Program) [2012CB932903]
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The alpha-quartz could grow at the interface of silicon nanowires (SiNWs) after thermal treatment. The SiNW/alpha-quartz composite was utilized as an active layer to fabricate piezoelectric nanogenerators on a flexible polyethylene terephthalate substrate, capable of converting mechanical energy into electricity. An insulative Al2O3 layer was designed to fill the gaps of the composite to avoid the leakage of current by atomic layer deposition and reactive ion etching process. The flexible nanogenerators produced an average short-circuit current of 0.6 mu A under the force of 60 N and the maximum power value reached about 380 nW with the load resistance of 20 M Omega. (C) 2015 Elsevier B.V. All rights reserved.
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