Embedded Capacitive Displacement Sensor for Nanopositioning Applications

Published 2011 View Full Article

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Title
Embedded Capacitive Displacement Sensor for Nanopositioning Applications
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume 60, Issue 7, Pages 2730-2737
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-14
DOI
10.1109/tim.2011.2126150
References
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