Embedded Capacitive Displacement Sensor for Nanopositioning Applications

标题
Embedded Capacitive Displacement Sensor for Nanopositioning Applications
作者
关键词
-
出版物
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume 60, Issue 7, Pages 2730-2737
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-05-14
DOI
10.1109/tim.2011.2126150

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