A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning

Title
A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 58, Issue 8, Pages 3601-3615
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-10-08
DOI
10.1109/tie.2010.2084972

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