Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition

Published 2013 View Full Article

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Title
Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 61, Issue 1, Pages 73-78
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-11-20
DOI
10.1109/ted.2013.2288925

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