Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition

标题
Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 61, Issue 1, Pages 73-78
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2013-11-20
DOI
10.1109/ted.2013.2288925

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