Scaling Limits of Electrostatic Nanorelays

The relay reborn

(2012) Tsu-Jae Liu et al.   IEEE SPECTRUM

Nanoelectromechanical contact switches

(2012) Owen Y. Loh et al.   Nature Nanotechnology

Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications

(2010) Matthew Spencer et al.   IEEE JOURNAL OF SOLID-STATE CIRCUITS

Design, Optimization, and Scaling of MEM Relays for Ultra-Low-Power Digital Logic

(2010) Hei Kam et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

MEMS technology integrated in the CMOS back end

(2010) R. Gaddi et al.   MICROELECTRONICS RELIABILITY

Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires

(2010) X. L. Feng et al.   NANO LETTERS