Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Development
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Title
Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Development
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 60, Issue 9, Pages 2862-2869
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-08-16
DOI
10.1109/ted.2013.2275259
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