Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Development
出版年份 2013 全文链接
标题
Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Development
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 60, Issue 9, Pages 2862-2869
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2013-08-16
DOI
10.1109/ted.2013.2275259
参考文献
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