Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems

Authors

Keywords

Journal

Volume 58, Issue 3, Pages 748-757

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2011-01-04

DOI

10.1109/ted.2010.2099870

Discuss science. Find collaborators. Network.

Join a conversation

Explore over 38,000 international journals covering a vast array of academic fields.