Improved Performance of Yttrium-Doped $\hbox{Al}_{2}\hbox{O}_{3}$ as Inter-Poly Dielectric for Flash-Memory Applications

Published 2011 View Full Article

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Title
Improved Performance of Yttrium-Doped $\hbox{Al}_{2}\hbox{O}_{3}$ as Inter-Poly Dielectric for Flash-Memory Applications
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
Volume 11, Issue 3, Pages 490-494
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-21
DOI
10.1109/tdmr.2011.2156796

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