Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method

Title
Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 35, Issue 3, Pages 360-362
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-02-01
DOI
10.1109/led.2013.2296604

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