4.6 Article

Large-Signal RF Performance of Nanocrystalline Diamond Coated AlGaN/GaN High Electron Mobility Transistors

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 35, Issue 10, Pages 1013-1015

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2014.2345631

Keywords

NCD; load-pull; amplifier; reliability

Funding

  1. Office of Naval Research

Ask authors/readers for more resources

In this split-wafer study, we have compared the dc, pulsed, small and large signal RF electrical performance of nanocrystalline diamond (NCD) coated AlGaN/GaN high electron mobility transistors (HEMTs) to reference devices with silicon nitride passivation only. The NCD-coated HEMTs were observed to outperform reference devices in transconductance, large-signal gain, output power density, and power-added efficiency at 4 GHz. The measured improvements were suspected to be related to reduced dispersion and lower source access resistance afforded by the NCD film.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Engineering, Electrical & Electronic

Full thermal characterization of AlGaN/GaN high electron mobility transistors on silicon, silicon carbide, and diamond substrates using a reverse modeling approach

A. El-Helou, Y. Cui, M. J. Tadjer, T. J. Anderson, D. Francis, T. Feygelson, B. Pate, K. D. Hobart, P. E. Raad

Summary: The study presents full thermal characterization of GaN power devices with different substrates to manage performance-limiting self-heating by utilizing an innovative reverse modeling approach. It compares the thermal properties of HEMTs on Si, SiC, and Diamond substrates and provides conclusions to guide further developments in GaN HEMT thermal management strategies.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2021)

Article Nanoscience & Nanotechnology

Phase Identification and Ordered Vacancy Imaging in Epitaxial Metallic Ta2N Thin Films

Andrew C. Lang, D. Scott Katzer, Neeraj Nepal, David J. Meyer, Rhonda M. Stroud

Summary: Epitaxial transition metal nitrides (TMNs) are a new class of crystalline thin film metals that can be integrated with common group III-nitride semiconductors. This study used high-resolution transmission electron microscopy to identify different phases of tantalum nitrides with N-sublattice ordering, revealing Ta-deficient films with specific planar defects. These findings lay the foundation for the application of this epitaxial TMN material in new electronic and superconducting device structures.

ACS APPLIED MATERIALS & INTERFACES (2021)

Article Multidisciplinary Sciences

An all-epitaxial nitride heterostructure with concurrent quantum Hall effect and superconductivity

Phillip Dang, Guru Khalsa, Celesta S. Chang, D. Scott Katzer, Neeraj Nepal, Brian P. Downey, Virginia D. Wheeler, Alexey Sus, Andy Xie, Edward Beam, Yu Cao, Cathy Lee, David A. Muller, Huili Grace Xing, David J. Meyer, Debdeep Jena

Summary: Researchers have successfully observed the integer quantum Hall effect in a two-dimensional electron gas by combining high critical temperature nitride superconductors with nitride semiconductor heterostructures of metal polarity.

SCIENCE ADVANCES (2021)

Article Chemistry, Physical

Oxygenation of Diamond Surfaces via Hummer's Method

Anand B. Puthirath, Eliezer F. Oliveira, Guanhui Gao, Nithya Chakingal, Harikishan Kannan, Chenxi Li, Xiang Zhang, Abhijit Biswas, Mahesh R. Neupane, Bradford B. Pate, Dmitry A. Ruzmetov, A. Glen Birdwell, Tony G. Ivanov, Douglas S. Galvao, Robert Vajtai, Pulickel M. Ajayan

Summary: The study found that Hummer's method is very effective in oxidizing pristine diamond surfaces, especially in the presence of strong oxidizing agents. Microcrystalline diamond powder is more prone to oxidation to polycrystalline diamond wafers.

CHEMISTRY OF MATERIALS (2021)

Article Engineering, Environmental

Nanosecond Transient Absorption of Hydrated Electrons and Reduction of Linear Perfluoroalkyl Acids and Sulfonates

William A. Maza, Vanessa M. Breslin, Jeffrey C. Owrutsky, Bradford B. Pate, Albert Epshteyn

Summary: This study investigates the rate constants and activation energies associated with the reduction of linear perfluoroalkyl carboxylates and perfluoroalkyl sulfonates by hydrated electrons. The results show that the reduction process is diffusion-controlled with no significant differences in activation energies between the two surfactants, despite slightly different rate constants observed.

ENVIRONMENTAL SCIENCE & TECHNOLOGY LETTERS (2021)

Article Engineering, Environmental

Impact of Submicellar Aggregation on Reduction Kinetics of Perfluorooctanoate by the Hydrated Electron

William A. Maza, Brian D. Etz, Timothy C. Schutt, Brian L. Chaloux, Vanessa M. Breslin, Bradford B. Pate, Manoj K. Shukla, Jeffrey C. Owrutsky, Albert Epshteyn

Summary: Disagreements persist regarding the rate constants for the initial reduction of perfluorooctanoate (PFOA) by the hydrated electron, eaq-. In this study, a nonlinear dependence of the eaq- decay rate on the PFOA concentration is demonstrated, which is attributed to the aggregation of PFOA below the critical micellar concentration. A kinetic model is proposed to explain the reaction between PFOA and eaq- at low concentrations, and the model adequately fits the experimental data. The results suggest that the aggregation of PFOA decreases the probability of its reduction by eaq-.

ENVIRONMENTAL SCIENCE & TECHNOLOGY LETTERS (2022)

Article Materials Science, Multidisciplinary

Mg-Facilitated Growth of Cubic Boron Nitride by Ion Beam-Assisted Molecular Beam Epitaxy

David F. Storm, Sergey Maximenko, Andrew C. Lang, Neeraj Nepal, Tatyana Feygelson, Bradford B. Pate, Chaffra A. Affouda, David J. Meyer

Summary: Trace amounts of Mg deposited on a diamond (100) substrate surface assist in the growth of cubic boron nitride (c-BN) through ion beam-assisted molecular beam epitaxy. Films grown with Mg exhibit primarily cubic structures, with a high density of stacking faults and twinning observed in high-resolution scanning transmission electron microscopy.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2022)

Article Physics, Applied

Measurements and numerical calculations of thermal conductivity to evaluate the quality of β-gallium oxide thin films grown on sapphire and silicon carbide by molecular beam epitaxy

Diego Vaca, Matthew Barry, Luke Yates, Neeraj Nepal, D. Scott Katzer, Brian P. Downey, Virginia Wheeler, Luke Nyakiti, David J. Meyer, Samuel Graham, Satish Kumar

Summary: In this study, we investigate the lower thermal conductivity of beta-Ga2O3 thin films grown by MBE. We compare experimental results with numerical predictions and find that the presence of boundary scattering and defects significantly affect the thermal conductivity of the thin films. By considering various types of defects in the calculations, we identify that crystals with gallium vacancies and stacking faults exhibit thermal conductivities closer to the experimental values. These findings provide insights for improving the thermal conductivity of MBE-grown samples.

APPLIED PHYSICS LETTERS (2022)

Article Engineering, Electrical & Electronic

X-Ka Band Epitaxial ScAlN/AlN/NbN/SiC High-Overtone Bulk Acoustic Resonators

Vikrant J. Gokhale, Matthew T. Hardy, D. Scott Katzer, Brian P. Downey

Summary: This letter presents the first demonstration of epitaxial scandium aluminum nitride (ScAlN) based high-overtone bulk acoustic resonators (epi-HBARs) with over 1600 acoustic cavity resonance modes spanning the X - Ka bands (8 GHz - 40 GHz). Key metrics for the ScAlN epi-HBARs include Q > 7000, fxQ > 10(14) Hz, and k(eff)(2) xQ(BVD) > 0.22 at cryogenic temperatures for frequencies as high as 40 GHz (>500, >6 x 10(12) Hz, >0.1 at room temperature). Such robust RF MEMS epi-HBARs with piezoelectric drive and readout are promising candidates for compact microwave/millimeter wave signal processing elements.

IEEE ELECTRON DEVICE LETTERS (2023)

Article Engineering, Electrical & Electronic

Micro-Transfer Printing for Heterogeneous Integration of GaN and GaAs HEMTs

Brian P. Downey, Shawn Mack, Andy Xie, D. Scott Katzer, Andrew C. Lang, James G. Champlain, Yu Cao, Neeraj Nepal, Tyler A. Growden, Vikrant J. Gokhale, Matthew T. Hardy, Edward Beam, Cathy Lee, David J. Meyer

Summary: In this study, the micro-transfer printing technique is used to integrate two solid-state RF device technologies, GaN and GaAs high-electron-mobility transistors, on the same interposer. The devices are released from their growth substrate using an epitaxial sacrificial layer, and a thin polymer adhesion layer is used to ensure a strong bond with the target substrate. The results show that the device/interposer interface has no voids, and the polymer adhesion layer has a thickness of 5+/-2 nm. There is no significant degradation in dc electrical characteristics after device transfer for either device technology. The ability to combine different solid-state technologies at the device level with high density offers a promising approach for meeting the demands of next-generation RF and mixed-signal circuits.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2023)

Article Materials Science, Coatings & Films

Structural characterization of epitaxial γ-Ta2N thin films and AlN/γ-Ta2N heterostructures on SiC substrates

Neeraj Nepal, D. Scott Katzer, Andrew C. Lang, Brian P. Downey, Matthew T. Hardy, David J. Meyer

Summary: Tantalum nitride (γ-Ta2N) thin films were grown on 3 in. diameter 6H- or 4H-SiC substrates by radiofrequency plasma molecular beam epitaxy (MBE). The MBE grown layers showed epitaxial characteristics and nearly pure γ-Ta2N phase. The lattice parameters and strain of the films on SiC were measured. Additionally, the MBE growth of AlN/γ-Ta2N /SiC heterostructures was demonstrated.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2023)

Article Acoustics

Dynamic Mode Suppression and Frequency Tuning in S-Band GaN/YIG Magnetoelastic HBARs

Vikrant J. Gokhale, Albrecht Jander, Brian P. Downey, Pallavi Dhagat, Shawn C. Mack, D. Scott Katzer, Jason A. Roussos, David J. Meyer

Summary: This study presents a detailed characterization and analysis of magnetoelastic high-overtone bulk acoustic resonators (ME-HBARs) operating in the S-band. These devices are fabricated by microtransfer printing piezoelectric GaN transducers onto a ferrimagnetic YIG substrate. The experiment demonstrates the hybridization of phonons and magnons in YIG, allowing for the suppression or tuning of acoustic modes in the ME-HBAR. The ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, and frequency selective limiters in RF signal processing subcomponents.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2023)

Article Physics, Applied

Impact of surface preparation on the epitaxial growth of SrTiO3 on ScAlN/GaN heterostructures

Eric N. Jin, Andrew C. Lang, Brian P. Downey, Vikrant J. Gokhale, Matthew T. Hardy, Neeraj Nepal, D. Scott Katzer, Virginia D. Wheeler

Summary: This work demonstrates the growth of SrTiO3 thin films on high-electron-mobility transistor heterostructures based on an emergent ultra-wide bandgap (UWBG) semiconductor ScAlN, and investigates the effects of pre-growth chemical treatments on the heterostructure properties. It is found that among the treatments studied, the solvent and sulfuric-phosphoric acid cleans have the least disruptive effects on the electrical properties of the GaN channel, while the sulfuric-phosphoric acid clean results in the best oxide crystallinity. The transmission electron microscopy imaging reveals that intermixing occurs at the oxide-nitride interfaces for both samples, but the sample treated with sulfuric-phosphoric acid has lower interface roughness and larger STO grain size.

JOURNAL OF APPLIED PHYSICS (2023)

Article Physics, Applied

Nucleation control of high crystal quality heteroepitaxial Sc0.4Al0.6N grown by molecular beam epitaxy

Matthew T. Hardy, Andrew C. Lang, Eric N. Jin, Neeraj Nepal, Brian P. Downey, Vikrant J. Gokhale, D. Scott Katzer, Virginia D. Wheeler

Summary: This work investigates the role of nucleation layer, growth temperature, and strain management in maximizing the material properties of high ScN fraction ScxAl1-xN on SiC substrates. The study finds that optimizing these factors can improve the crystal quality and defect density of ScxAl1-xN material, making it suitable for applications in RF resonators, filters, and ferroelectric devices.

JOURNAL OF APPLIED PHYSICS (2023)

Proceedings Paper Engineering, Electrical & Electronic

PHONON DIFFRACTION LIMITED PERFORMANCE OF FABRY-PEROT CAVITIES IN PIEZOELECTRIC EPI - HBARS

Vikrant J. Gokhale, Brian P. Downey, D. Scott Katzer, David J. Meyer

Summary: This study investigates the phonon diffraction limited performance of GaN/AIN/NbN/SiC epitaxial HBARs and explores the tradeoffs in using them compared to confocal HBARs with curved engineered surfaces. The smallest epi-HBARs achieve high performance near the diffraction limit at 7.2K, while larger devices not limited by diffraction exhibit even higher performance.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

No Data Available