4.6 Article

Impact of Biasing Conditions on Displacement Transduction by III-Nitride Microcantilevers

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 35, Issue 12, Pages 1299-1301

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2014.2360866

Keywords

AlGaN/GaN; HFET; gauge factor; MEMS/NEMS; self-sensing

Funding

  1. National Science Foundation [ECCS-1348166, ECCS-0846898, ECCS-1343437]

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The impact of biasing conditions on the sensitivity of an AlGaN/GaN heterojunction field-effect transistor deflection transducer, fabricated at the base of a GaN microcantilever, has been investigated. The gauge factor is found to increase with negative gate bias, reaching 3200 at 3.1 V, which is at least an order of magnitude higher than Si piezoresistors. Ultrahigh ac deflection responsivity has also been observed, which reached a maximum value of 140 mu V/nm at a gate bias of 2.3 V, consuming only 51 mu W of power.

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