Ultra Low Contact Resistivities for CMOS Beyond 10-nm Node

Published 2013 View Full Article

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Title
Ultra Low Contact Resistivities for CMOS Beyond 10-nm Node
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 34, Issue 6, Pages 723-725
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-05-22
DOI
10.1109/led.2013.2257664

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