Electrical Performance Enhancement of Al–Zn-Sn–O Thin Film Transistor by Supercritical Fluid Treatment

Published 2013 View Full Article

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Title
Electrical Performance Enhancement of Al–Zn-Sn–O Thin Film Transistor by Supercritical Fluid Treatment
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 34, Issue 9, Pages 1154-1156
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-08-03
DOI
10.1109/led.2013.2272117

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